AS-One 100 RTP

Location

ERC - Engineering Research Center, cleanroom 146

Description

AS-One 100 is a rapid thermal processor for annealing films.

Techniques

• rapid thermal processing

Documents and manuals

• File

  AS-One100 SOP Rev B.pdf893.53 KB

ASU Unit

Knowledge Enterprise

Rates

Service	ASU Internal Rate	External Organization Rate	Notes
Equipment Use	$52.5/hour	Contact NanoFab

Photos