Description
The theta-SE ellipsometer is used to determine thickness and optical constants of thin films.
- 65° angle of incidence
- 400 – 1000nm spectral range
- Mapping capability for substrates up to 300mm diameter
- CompleteEASE data analysis software
Location: MTW – MacroTechnology Works, cleanroom 1323
Techniques
- Ellipsometry
ASU Unit
Knowledge Enterprise
Photos
