Equipment

Equipment Techniques
01. Alessi probe station Dark I-V testing and characterization
02. BT Imaging LIS-R3 (Allen B) I-V testing and characterization, Electroluminescence, Suns Voc, I-V testing and characterization
03. KLA Zeta-300 optical profiler Pyramid size and height in textured wafers, Fingers and busbar analysis, Fully automated measurements, Configurable for wafers with a diameter up to 300mm, Extended z-stage travel ranges up to 280mm for very tall samples
04. KOH hood Wet Etching
05. Etch SRD 3 Final substrate rinsing and drying after wet processing
06. MRC 944 (Zolushka) Thin film sputtering
07. MRC 943 (Batwings) Thin film sputtering
08. Sierra Therm Belt Furnace Annealing, Paste firing
09. Analytical balance In-line characterization of KOH process, Weighing e-beam charges
10. Four Point Probe Bulk resistivity, Sheet resistance
11. Zeiss Axiotron microscope Substrate inspection
12. Dektak IIA profilometer Film thickness characterization
13. NanoSpec/AFT Film thickness characterization
14. Sinton FCT-450 I-V testing and characterization
15. Muffle furnace 4 Annealing, Paste curing and drying
16. Muffle furnace 5 Annealing, Paste curing and drying
17. nTact nRad slot-die coater Substrate coating
18. APS GF-12 reflow oven Annealing, Paste drying
19. Steag-AST RTA Rapid thermal annealing, rapid thermal processing, Paste curing and drying
20. PV Measurements QEX10 Measurement of quantum efficiency of solar cells, Reflectance
21. AMAT P-5000 PECVD
22. Screen printer 1 (AMI) Screen printing
23. Screen printer 2 (MPM) Screen printing
24. Screen printer 3 (Baccini) Screen printing
25. MRL furnace Dry thermal oxidation, POCl3 diffusion, Annealing
26. Acid/solvent hood Wet chemical processing
27. Acid hood 1 (RCA-A and -B)
28. Acid hood 2 (BOE) Wet chemical processing
29. SRD 5 Final substrate rinsing and drying after wet processing
30. Dual stack SRD (SRD 7) Final substrate rinsing and drying after wet processing
31. Piranha hood Wet chemical processing
32. Sinton lifetime tester Lifetime measurement of passivated substrates
33. EL/PL Electroluminescence, Photoluminescence
34. Veeco Gen III MBE
35. Soitec GaAs hood Wet chemical processing
36. Etch SRD 1 Final substrate rinsing and drying after wet processing
37. Acid hood 5 Wet chemical processing
38. Solvent hood Solvent cleaning of screens
39. Leitz Ergolux Substrate inspection
40. Temescal FC-1800 e-beam evaporation
41. Veeco D-180 MOCVD
42. ERE #1 External radiative efficiency characterization
43. Newport SS I-V tester I-V testing and characterization
44. Electrox EMS 100 laser Edge isolation, Silicon cutting
45. NPC laminator Module lamination
46. Technic Ni LiP Electroplating
47. Technic Cu LiP Electroplating
48. Technic Sn LiP Electroplating
49. Plating hood 2 Electroplating
50. Solvent hood Wet chemical processing, Solvent cleans
51. Plating hood 1 Electroplating
52. Kintai JTS-331 ECA dispenser Cell interconnection
53. BrightSpot ContactSpot TLM characterization
54. Soldering station Cell interconnection
55. Frigidaire refrigerator Lamination material storage
56. Octopus PECVD PECVD
57. Octopus acid hood Wet chemical processing
58. Semitool SRD Final substrate rinsing and drying after wet processing
59. Veeco Savannah Atomic Layer Deposition Atomically precise, pinhole-free deposition, Conformal deposition over high aspect ratios
60. Veeco Fiji – Plasma Enhanced ALD for R&D Atomically precise, pinhole-free deposition
61. Cobalt Fusion laser Cell interconnection
62. Universal Laser Systems 2001 Laser patterning
63. 3D printer Prototyping
64. Fluxim Litos degradation analysis
65. Thermo Sensorik ThermoSpector Lock-in thermography characterization
66. Hitachi U-4100 Transmittance, Reflectance, Absorbance
67. CSZ environmental chamber #1 Reliability testing
68. Cole-Parmer oven Reliability testing
69. CSZ environmental chamber #2 Reliability testing
70. San-EI Electric XHS-50S1-SA I-V testing and characterization
71. San-Ei Electric XHS-220S1-SA I-V testing and characterization
72. Sinton custom tester I-V testing and characterization
73. Sinton FMT-500 Module I-V testing and characterization