01. Alessi probe station |
Dark I-V testing and characterization |
02. BT Imaging LIS-R3 (Allen B) |
I-V testing and characterization, Electroluminescence, Suns Voc, I-V testing and characterization |
03. KLA Zeta-300 optical profiler |
Pyramid size and height in textured wafers, Fingers and busbar analysis, Fully automated measurements, Configurable for wafers with a diameter up to 300mm, Extended z-stage travel ranges up to 280mm for very tall samples |
04. KOH hood |
Wet Etching |
05. Etch SRD 3 |
Final substrate rinsing and drying after wet processing |
06. MRC 944 (Zolushka) |
Thin film sputtering |
07. MRC 943 (Batwings) |
Thin film sputtering |
08. Sierra Therm Belt Furnace |
Annealing, Paste firing |
09. Analytical balance |
In-line characterization of KOH process, Weighing e-beam charges |
10. Four Point Probe |
Bulk resistivity, Sheet resistance |
11. Zeiss Axiotron microscope |
Substrate inspection |
12. Dektak IIA profilometer |
Film thickness characterization |
13. NanoSpec/AFT |
Film thickness characterization |
14. Sinton FCT-450 |
I-V testing and characterization |
15. Muffle furnace 4 |
Annealing, Paste curing and drying |
16. Muffle furnace 5 |
Annealing, Paste curing and drying |
17. nTact nRad slot-die coater |
Substrate coating |
18. APS GF-12 reflow oven |
Annealing, Paste drying |
19. Steag-AST RTA |
Rapid thermal annealing, rapid thermal processing, Paste curing and drying |
20. PV Measurements QEX10 |
Measurement of quantum efficiency of solar cells, Reflectance |
21. AMAT P-5000 |
PECVD |
22. Screen printer 1 (AMI) |
Screen printing |
23. Screen printer 2 (MPM) |
Screen printing |
24. Screen printer 3 (Baccini) |
Screen printing |
25. MRL furnace |
Dry thermal oxidation, POCl3 diffusion, Annealing |
26. Acid/solvent hood |
Wet chemical processing |
27. Acid hood 1 (RCA-A and -B) |
|
28. Acid hood 2 (BOE) |
Wet chemical processing |
29. SRD 5 |
Final substrate rinsing and drying after wet processing |
30. Dual stack SRD (SRD 7) |
Final substrate rinsing and drying after wet processing |
31. Piranha hood |
Wet chemical processing |
32. Sinton lifetime tester |
Lifetime measurement of passivated substrates |
33. EL/PL |
Electroluminescence, Photoluminescence |
34. Veeco Gen III |
MBE |
35. Soitec GaAs hood |
Wet chemical processing |
36. Etch SRD 1 |
Final substrate rinsing and drying after wet processing |
37. Acid hood 5 |
Wet chemical processing |
38. Solvent hood |
Solvent cleaning of screens |
39. Leitz Ergolux |
Substrate inspection |
40. Temescal FC-1800 |
e-beam evaporation |
41. Veeco D-180 |
MOCVD |
42. ERE #1 |
External radiative efficiency characterization |
43. Newport SS I-V tester |
I-V testing and characterization |
44. Electrox EMS 100 laser |
Edge isolation, Silicon cutting |
45. NPC laminator |
Module lamination |
46. Technic Ni LiP |
Electroplating |
47. Technic Cu LiP |
Electroplating |
48. Technic Sn LiP |
Electroplating |
49. Plating hood 2 |
Electroplating |
50. Solvent hood |
Wet chemical processing, Solvent cleans |
51. Plating hood 1 |
Electroplating |
52. Kintai JTS-331 ECA dispenser |
Cell interconnection |
53. BrightSpot ContactSpot |
TLM characterization |
54. Soldering station |
Cell interconnection |
55. Frigidaire refrigerator |
Lamination material storage |
56. Octopus PECVD |
PECVD |
57. Octopus acid hood |
Wet chemical processing |
58. Semitool SRD |
Final substrate rinsing and drying after wet processing |
59. Veeco Savannah Atomic Layer Deposition |
Atomically precise, pinhole-free deposition, Conformal deposition over high aspect ratios |
60. Veeco Fiji – Plasma Enhanced ALD for R&D |
Atomically precise, pinhole-free deposition |
61. Cobalt Fusion laser |
Cell interconnection |
62. Universal Laser Systems 2001 |
Laser patterning |
63. 3D printer |
Prototyping |
64. Fluxim Litos |
degradation analysis |
65. Thermo Sensorik ThermoSpector |
Lock-in thermography characterization |
66. Hitachi U-4100 |
Transmittance, Reflectance, Absorbance |
67. CSZ environmental chamber #1 |
Reliability testing |
68. Cole-Parmer oven |
Reliability testing |
69. CSZ environmental chamber #2 |
Reliability testing |
70. San-EI Electric XHS-50S1-SA |
I-V testing and characterization |
71. San-Ei Electric XHS-220S1-SA |
I-V testing and characterization |
72. Sinton custom tester |
I-V testing and characterization |
73. Sinton FMT-500 |
Module I-V testing and characterization |