| 00. J.A. Woollam theta-SE Spectroscopic Ellipsometer |
Ellipsometry |
| 01. Alessi probe station |
Dark I-V testing and characterization |
| 02. BT Imaging LIS-R3 (Allen B) |
I-V testing and characterization, Electroluminescence, Suns Voc, I-V testing and characterization |
| 03. KLA Zeta-300 optical profiler |
Pyramid size and height in textured wafers, Fingers and busbar analysis, Fully automated measurements, Configurable for wafers with a diameter up to 300mm, Extended z-stage travel ranges up to 280mm for very tall samples |
| 04. KOH hood |
Wet Etching |
| 05. Etch SRD 3 |
Final substrate rinsing and drying after wet processing |
| 06. MRC 944 (Zolushka) |
Thin film sputtering |
| 07. MRC 943 (Batwings) |
Thin film sputtering |
| 08. Sierra Therm Belt Furnace |
Annealing, Paste firing |
| 09. Analytical balance |
In-line characterization of KOH process, Weighing e-beam charges |
| 10. Four Point Probe |
Bulk resistivity, Sheet resistance |
| 11. Zeiss Axiotron microscope |
Substrate inspection |
| 12. KLA-Tencor P-17 OF Profiler |
Surface Profiling |
| 13. NanoSpec/AFT |
Film thickness characterization |
| 14. Sinton FCT-450 |
I-V testing and characterization |
| 15. Muffle furnace 4 |
Annealing, Paste curing and drying |
| 16. Muffle furnace 5 |
Annealing, Paste curing and drying |
| 17. nTact nRad slot-die coater |
Substrate coating |
| 18. APS GF-12 reflow oven |
Annealing, Paste drying |
| 19. Steag-AST RTA |
Rapid thermal annealing, rapid thermal processing, Paste curing and drying |
| 20. PV Measurements QEX10 |
Measurement of quantum efficiency of solar cells, Reflectance |
| 21. AMAT P-5000 |
PECVD |
| 22. Screen printer 1 (AMI) |
Screen printing |
| 23. Screen printer 2 (MPM) |
Screen printing |
| 24. Screen printer 3 (Baccini) |
Screen printing |
| 25. MRL furnace |
Dry thermal oxidation, POCl3 diffusion, Annealing |
| 26. Acid/solvent hood |
Wet chemical processing |
| 27. Acid hood 1 (RCA-A and -B) |
|
| 28. Acid hood 2 (BOE) |
Wet chemical processing |
| 29. SRD 5 |
Final substrate rinsing and drying after wet processing |
| 30. Dual stack SRD (SRD 7) |
Final substrate rinsing and drying after wet processing |
| 31. Piranha hood |
Wet chemical processing |
| 32. Sinton lifetime tester |
Lifetime measurement of passivated substrates |
| 33. EL/PL |
Electroluminescence, Photoluminescence |
| 35. Soitec GaAs hood |
Wet chemical processing |
| 36. Etch SRD 1 |
Final substrate rinsing and drying after wet processing |
| 37. Acid hood 5 |
Wet chemical processing |
| 38. Solvent hood |
Solvent cleaning of screens |
| 39. Leitz Ergolux |
Substrate inspection |
| 40. Temescal FC-1800 |
e-beam evaporation |
| 41. Veeco D-180 |
MOCVD |
| 42. ERE #1 |
External radiative efficiency characterization |
| 43. Newport SS I-V tester |
I-V testing and characterization |
| 44. Electrox EMS 100 laser |
Edge isolation, Silicon cutting |
| 45. NPC laminator |
Module lamination |
| 46. Technic Ni LiP |
Electroplating |
| 47. Technic Cu LiP |
Electroplating |
| 48. Technic Sn LiP |
Electroplating |
| 49. Plating hood 2 |
Electroplating |
| 50. Solvent hood |
Wet chemical processing, Solvent cleans |
| 51. Plating hood 1 |
Electroplating |
| 52. Kintai JTS-331 ECA dispenser |
Cell interconnection |
| 53. BrightSpot ContactSpot |
TLM characterization |
| 54. Soldering station |
Cell interconnection |
| 55. Frigidaire refrigerator |
Lamination material storage |
| 56. Octopus PECVD |
PECVD |
| 57. Octopus acid hood |
Wet chemical processing |
| 58. Semitool SRD |
Final substrate rinsing and drying after wet processing |
| 59. Veeco Savannah Atomic Layer Deposition |
Atomically precise, pinhole-free deposition, Conformal deposition over high aspect ratios |
| 60. Veeco Fiji – Plasma Enhanced ALD for R&D |
Atomically precise, pinhole-free deposition |
| 61. Cobalt Fusion laser |
Cell interconnection |
| 62. Universal Laser Systems 2001 |
Laser patterning |
| 64. Fluxim Litos |
degradation analysis |
| 65. Thermo Sensorik ThermoSpector |
Lock-in thermography characterization |
| 66. Hitachi U-4100 |
Transmittance, Reflectance, Absorbance |
| 67. CSZ environmental chamber #1 |
Reliability testing |
| 68. Cole-Parmer oven |
Reliability testing |
| 69. CSZ environmental chamber #2 |
Reliability testing |
| 70. San-EI Electric XHS-50S1-SA |
I-V testing and characterization |
| 71. San-Ei Electric XHS-220S1-SA |
I-V testing and characterization |
| 72. Sinton custom tester |
I-V testing and characterization |
| 73. Sinton FMT-500 |
Module I-V testing and characterization |
