06. MRC 944 (Zolushka)

Description

4 target DC sputter tool for conductive targets. Currently installed are targets for 90/10 ITO, 90/10 IZO, Al, and Ag. Not currently installed but appropriate for the 944 is Ni.

Location: MTW - MacroTechnology Works, cleanroom 2209

Techniques
  • Thin film sputtering
ASU Unit
Knowledge Enterprise
Photos
MRC 944 (Zolushka)