Description
The four point probe at the Solar Fab is a Signatone S 302-8. The tool measures bulk resitivity (ohm-cm) and sheet resistivity (ohm/square) of wafers and diffusions. A custom LabVIEW program provides the user interface and drives the power supply. Accuracy and repeatability is greatly improved by a linear regression fit to a large range of bias voltages.
Location: MTW - MacroTechnology Works, cleanroom 2213
Techniques
- Bulk resistivity
- Sheet resistance
ASU Unit
Knowledge Enterprise
Photos
