29. SRD 5

Description

This is the spin rinse dryer configured for 156 mm substrates and that supports substrates that were processed in the adjacent hoods (Acid/solvent hood, Acid hood 1, Acid hood 2, and the Piranha hood).

Location: MTW - MacroTechnology Works, cleanroom 2213

Techniques
  • Final substrate rinsing and drying after wet processing
ASU Unit
Knowledge Enterprise
Photos
SRD 5