53. BrightSpot ContactSpot

Description

The ContactSpot tool allows for TLM-like measurements to be conducted on structures with a regular array, such as the H-pattern of solar cells. Specific contact resistivity, line resistance, and sheet resistance between gridlines can be acquired.

Location: MTW - MacroTechnology Works, H6 1319

Techniques
  • TLM characterization
ASU Unit
Knowledge Enterprise
Photos
51. BrightSpot ContactSpot