Description
Profilometry is a surface measurement technique to measure film step height or to quantify large-scale surface roughness. The profilometer at the Solar Fab is a contact profilometer in which a diamond stylus reacts vertically by virtue of contact with the sample while the sample is scanned laterally for a specified distance and with a specified contact force. The profilometer can measure small surface variations through vertical stylus displacement as a function of position.
Location: MTW - MacroTechnology Works, cleanroom 2213
Techniques
- Film thickness characterization
ASU Unit
Knowledge Enterprise
Photos
