Description
The KLA-Tencor P-17 OF Profiler is a highly sensitive surface profiler that measures step height, roughness, and waviness on sample surfaces.
- It uses stylus-based scanning to achieve high resolution.
- It is capable of measuring samples up to 300mm diameter.
- The P-17 OF has a vertical range of 327 µm.
- It is capable of scanning at forces between 0.5 and 50 mg.
Techniques
- Surface Profiling
ASU Unit
Knowledge Enterprise
