Description
The belt furnace currently used at the Solar Fab is Sierratherm’s model 7k8-70C96-8LIR, an eight zone belt furnace modified to run a standard BTU controller for hardware and programming simplicity. Heating is accomplished by a plurality of tubular quartz IR lamps, and the maximum furnace temperature is 950 °C. The belt furnace accommodates up to 9 inch substrates and has a maximum belt speed of 240 inches/min. Cooling is accomplished by water cooled, open air cooled, and fan cooled sections.
Location: MTW - MacroTechnology Works, cleanroom 2213
Techniques
- Annealing
- Paste firing
ASU Unit
Knowledge Enterprise
Photos