Description
The FC-1800 is a standard e-beam evaporator equipped with a custom planetary to directly accommodate up to three 156 mm solar substrates or smaller sizes, including pieces. A four-pocket turret is present, and existing processes have been defined for Ti, Pt, Ag, and Al evaporation.
Location: MTW - MacroTechnology Works, cleanroom 2214
Techniques
- e-beam evaporation
ASU Unit
Knowledge Enterprise
Photos
