FormFactor Tesla CM300 Probe station

Description

The FormFactor Tesla CM300 probe station can provide unattended testing on small pads over time and at multiple temperatures. This instrument is capable of high-volume testing on up to 300mm diameter wafers. Measurements for I-V/C-V, RTN, and RF are possible with this probe station.

Chuck thermal range of -60oC to +300oC and DC, AC, and RF device characterization. Manual or automated probe positioning and alignment is possible.

Techniques
  • Probe station for electrical characterization of integrated circuit devices
  • Titration
Documents and manuals
ASU Unit
Knowledge Enterprise
Rates
Service ASU rate Nonprofit/other academic rate Private/ Industry Notes
Equipment Use $36/hour $55/hour Please contact AEPCore@asu.edu  
Photos
FormFactor Tesla CM3000