FormFactor Tesla CM300 Probe station


The FormFactor Tesla CM300 probe station can provide unattended testing on small pads over time and at multiple temperatures. This instrument is capable of high-volume testing on up to 300mm diameter wafers. Measurements for I-V/C-V, RTN, and RF are possible with this probe station.

Chuck thermal range of -60oC to +300oC and DC, AC, and RF device characterization. Manual or automated probe positioning and alignment is possible.

  • Probe station for electrical characterization of integrated circuit devices
  • Titration
Documents and manuals
ASU Unit
Knowledge Enterprise
Service ASU rate Nonprofit/other academic rate Notes
Equipment Use     TBD
FormFactor Tesla CM3000