The FormFactor Tesla CM300 probe station can provide unattended testing on small pads over time and at multiple temperatures. This instrument is capable of high-volume testing on up to 300mm diameter wafers. Measurements for I-V/C-V, RTN, and RF are possible with this probe station.
Chuck thermal range of -60oC to +300oC and DC, AC, and RF device characterization. Manual or automated probe positioning and alignment is possible.
- Probe station for electrical characterization of integrated circuit devices
- File1.41 MB
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