Equipment and rates

For industry rates, contact us.

1514 Solvent Hood

Service or material ASU rate Nonprofit or academic rate Notes
Equipment Use $54/hour $70/hour

6 inch Wet Etch Hood

Service or material ASU rate Nonprofit or academic rate Notes
Equipment use $54/hour $70/hour

AlWin21 RTP

Service or material ASU rate Nonprofit or academic rate Notes
Equipment use $44/hour $58/hour

AMAT Centura AP 300mm Plasma Etcher

Service or material ASU rate Nonprofit or academic rate Notes
Please contact [email protected]

Amerimade Acid Hood

Service or material ASU rate Nonprofit or academic rate Notes
Equipment Use $54/hour $70/hour

Angstrom #1 (Room 1504 South)

Service or material ASU rate Nonprofit or academic rate Notes
Equipment Use – Angstrom Evaporation Chamber $54/hr $70/hr
Equipment Use – Glovebox Spin Coater Module $54/hr $70/hr

Atmospheric Plasma System

Automated Optical Inspection

Automated Wafer Frame Mounter 200/300mm

Bagging Station

Service or material ASU rate Nonprofit or academic rate Notes
Equipment use $36/hour $50/hour

Ball Attach System

Biologic BCS-810/BCS-815 Battery Tester + Associated Environmental Systems SD-508-ATP Environmental Test Chamber

Service or material ASU rate Nonprofit or academic rate Notes
Equipment use $3/hour $3/hour

Bow/Warp Tool

Service or material ASU rate Nonprofit or academic rate Notes
Equipment Use $39/ hour $55/ hour

Camera Equipped Microscope

Service or material ASU rate Nonprofit or academic rate Notes
Equipment Use $36/ hour $50/ hour

Cary 5000 UV-Vis-NIR Spectrophotometer

Service or material ASU rate Nonprofit or academic rate Notes
Absorbance, Transmittance, and Reflectance Measurement $36/hr $50/hr

CEE Model 300 Spin Coater

Service or material ASU rate Nonprofit or academic rate Notes
Spin Coating $54/hr $70/hr You may have to provide your own material. Make sure the material is approved for Room 1514 prior to use.

CHA Metal Evaporator

Service or material ASU rate Nonprofit or academic rate Notes
Equipment use $44/hour $58/hour

CHA TCO Evaporator SR-10

Service or material ASU rate Nonprofit or academic rate Notes
Equipment use $44/hour $58/hour

Cole-Parmer Hot Plate

Service or material ASU rate Nonprofit or academic rate Notes
Equipment use $59/hour $77/hour

Composite Material Wafer Grinder 200/300mm

Compression Mold System

Copper Mountain S5085 Network Analyzer

Despatch Oven

Service or material ASU rate Nonprofit or academic rate Notes
Equipment Use $5/ hour $6/ hour

Dicing Saw 300mm

Die Measurement System

Die/Chip Attach System

DYMAX 5000 UV Flood Lamp

Service or material ASU rate Nonprofit or academic rate Notes
Equipment use $59/hour $77/hour

Ecopia Hall Effect Measurement System

Service or material ASU rate Nonprofit or academic rate Notes
Hall Measurement $36/hour $50/hour

Electroglas 2001x Probe System

Service or material ASU rate Nonprofit or academic rate Notes
Equipment use $36/hour $50/hour

Explorer Pro Scale

Service or material ASU rate Nonprofit or academic rate Notes
Equipment use $36/hour $50/hour

Filmetrics F50 Reflectometer

Service or material ASU rate Nonprofit or academic rate Notes
Measurement $36/hr $50/hr Up to 200 mm wafers accepted

FINEPLACER® pico 2

FormFactor Tesla CM300 Probe station

Service or material ASU rate Nonprofit or academic rate Notes
Equipment Use $36/hour $55/hour

FP-10 Stylus Profilometer

Service or material ASU rate Nonprofit or academic rate Notes
Equipment use $36/hour $50/hour

Heidelberg MLA-300

Service or material ASU rate Nonprofit or academic rate Notes
Equipment Use $59/hour $77/hour

Hewlett-Packard 3457A Multimeter

Service or material ASU rate Nonprofit or academic rate Notes
Equipment Use $5/hr $5/hr

Hewlett-Packard 4284A LCR Meter

Service or material ASU rate Nonprofit or academic rate Notes
Equipment Use $10/hr $10/hr

Hioki RM2610 Electrode Resistance Tester

Service or material ASU rate Nonprofit or academic rate Notes
Equipment Use $36/hr $50/hr

Horiba GD-Profiler 2 Glow Discharge Optical Emission Spectrometer

Service or material ASU rate Nonprofit or academic rate Notes
Automatic Film Applicator $36/hour $50/hour

HP T630 Plotter (36” Roll)

Service or material ASU rate Nonprofit or academic rate Notes
Equipment use $2/lineal foot $2/lineal foot

iBond 5000 Dual Model Wire Bonder

Jinlong PEEL Tester

Service or material ASU rate Nonprofit or academic rate Notes
Equipment use $36/hour $50/hour

Keithley 237 High Voltage Source-Measure Unit (SMU)

Service or material ASU rate Nonprofit or academic rate Notes
Equipment Use $5/hr $5/hr

Keithley 2611A SourceMeter

Service or material ASU rate Nonprofit or academic rate Notes
Equipment Use $5/hr $5/hr

Keithley 4200 Semiconductor Characterization System

Service or material ASU rate Nonprofit or academic rate Notes
Equipment Use $15/hr $15/hr

Keyence VHX-7000 Microscope

Service or material ASU rate Nonprofit or academic rate Notes
Equipment Use $36/hr $50/hr

Keyence VK-X3000 3D Surface Profiler

Service or material ASU rate Nonprofit or academic rate Notes
Equipment Use $36/hr $50/hr

Keysight B1505A Power Device Analyzer/Curve Tracer

Service or material ASU rate Nonprofit or academic rate Notes
Equipment Use $44/hr $55/hr Instrument available for discrete packaged device testing

Keysight M9484C VXG Vector Signal Generator

Keysight N5290A PNA-X

Keysight N9042B UXA Signal Analyzer

Keysight PD1500A Dynamic Power Device Analyzer/Double-Pulse Tester

Service or material ASU rate Nonprofit or academic rate Notes
Equipment Use $44/hr $55/hr Instrument available for discrete packaged device testing

KLA Tencor Omnimapper 4 Point Probe

Service or material ASU rate Nonprofit or academic rate Notes
Tool Usage $36/hr $50/hr

Kruss DSA20E Easy Drop Goniometer/Contact Angle Measurement

Service or material ASU rate Nonprofit or academic rate Notes
Contact Angle or Surface Tension Measurement $36/hr $50/hr

Laser Dicer 300mm

Laurell WS400B Spin Coater

Service or material ASU rate Nonprofit or academic rate Notes
Equipment use $59/hour $77/hour

Mettler Toledo Titration Equipment

Service or material ASU rate Nonprofit or academic rate Notes
Automatic Film Applicator $36/hr $50/hr

Micro Manipulator 4060

Service or material ASU rate Nonprofit or academic rate Notes
Equipment use $36/hour $50/hour

Mini Brute Tube Furnace – Model MB-80

Service or material ASU rate Nonprofit or academic rate Notes
Equipment use $44/hour $58/hour

MPI TS200 Manual Probe Station

MRC-603A

Service or material ASU rate Nonprofit or academic rate Notes
Equipment use $44/hour $58/hour

Olympus MHL110 Microscope

Service or material ASU rate Nonprofit or academic rate Notes
Equipment use $36/hour $50/hour

Osiris 1204 Coater and Developer

Service or material ASU rate Nonprofit or academic rate Notes
Equipment use $59/hour $77/hour

Park XE-150 Atomic Force Microscope

Service or material ASU rate Nonprofit or academic rate Notes
Equipment use $36/hour $50/hour

Photon Etc Hyperspectral Imager

Service or material ASU rate Nonprofit or academic rate Notes
Equipment Use $44/ hour $55/ hour

RF Test Bench (On-wafer)

RF Test Bench (Package/Benchtop)

Rohde & Schwarz FSW Signal & Spectrum Analyzer

Rohde & Schwarz SMW200A Vector Signal Generator

Roll Laminator

Sartorius Scale

Service or material ASU rate Nonprofit or academic rate Notes
Equipment use $36/hour $50/hour

Scanning Acoustic Microscope (SAM), PVA TePLA SAM 502 HD2

Service or material ASU rate Nonprofit or academic rate Notes
Usage $39/hr $55/hr

Scanning Electron Microscope (SEM), SU3900

Service or material ASU rate Nonprofit or academic rate Notes
Please contact [email protected]

Semi-Automated Debonder/Backside Laminate with Integrated Laser Mark

Silicon Wafer Grinder 200/300mm

Sun-Tec Laminator

Service or material ASU rate Nonprofit or academic rate Notes
Equipment use $59/hour $77/hour

Tegal 965

Service or material ASU rate Nonprofit or academic rate Notes
Equipment use $54/hour $70/hour

Tencor FLX-2350FP

Service or material ASU rate Nonprofit or academic rate Notes
Equipment use $36/hour $50/hour

Tencor P-16 Profilometer

Service or material ASU rate Nonprofit or academic rate Notes
Equipment Use $36/ hour $50/ hour

Tencor P2 Profilometer

Service or material ASU rate Nonprofit or academic rate Notes
Equipment use $36/hr $50/hr

Thermal Reflow Oven

Thermo Nicolet 6700 FTIR

Service or material ASU rate Nonprofit or academic rate Notes
Equipment use $36/hour $50/hour

Thinky ARE-310 Centrifugal Mixer

Service or material ASU rate Nonprofit or academic rate Notes
Equipment use $8/hour $10/hour Additional charge for container usage. We welcome industry customers! Contact us [email protected] to find out our current rates.

VWR Hot Plate

Service or material ASU rate Nonprofit or academic rate Notes
Equipment use $59/hour $77/hour

Western Magnum XRL180 Laminator

Service or material ASU rate Nonprofit or academic rate Notes
Equipment use $59/hour $77/hour

Woollam Ellipsometer M2000

Service or material ASU rate Nonprofit or academic rate Notes
Equipment use $36/hour $50/hour

Yamato DP43 Vacuum Bake Oven

Service or material ASU rate Nonprofit or academic rate Notes
Equipment use $59/hour $77/hour

Yamato DP63 Vacuum Bake Oven

Service or material ASU rate Nonprofit or academic rate Notes
Equipment use $59/hour $77/hour

YES – FPO HMDS Vapor Prime

Service or material ASU rate Nonprofit or academic rate Notes
Equipment use $59/hour $77/hour

Yokogawa WT5000 Precision Power Analyzer

Service or material ASU rate Nonprofit or academic rate Notes
Equipment Use $36/hr $50/hr

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