| 1514 Solvent Hood |
solvent cleaning, Spin coating, EBR |
| 6 inch Solvent hood |
solvent cleaning |
| 6 inch Wet Etch Hood |
Wafer cleaning |
| AlWin21 RTP |
rapid thermal processing |
| AMAT 8330 |
Etching |
| AMAT Centura AP 300mm Plasma Etcher |
Reactive ion etching |
| Amerimade Acid Hood |
Wet Etching |
| Angstrom #1 (Room 1504 South) |
Thermal evaporation, Filament evaporation, Nitrogen glovebox spin coating |
| Applied Materials AKT1600 |
Reactive ion etching of various layers and thicknesses of dielectrics and metals, Plasma enhanced chemical vapor deposition |
| Applied Materials P5000 |
Plasma enhanced chemical vapor deposition |
| Bagging Station |
Parts Bagging Station |
| Biologic BCS-810/BCS-815 Battery Tester + Associated Environmental Systems SD-508-ATP Environmental Test Chamber |
Titration |
| Camera Equipped Microscope |
Optical Microscopy |
| Cary 5000 UV-Vis-NIR Spectrophotometer |
Absorbance, Transmittance, and Reflectance Measurement: Optical Characterization of thin-films and liquids |
| CEE Model 300 Spin Coater |
Spin coating |
| CHA Metal Evaporator |
e-beam evaporation |
| CHA TCO Evaporator SR-10 |
Evaporation deposition |
| Cole-Parmer Hot Plate |
Heating |
| Despatch Oven |
Photolithography |
| DYMAX 5000 UV Flood Lamp |
Bonding, Curing of photosensitive materials |
| Ecopia Hall Effect Measurement System |
hall measurement |
| Electroglas 2001x Probe System |
Semiconductor wafer probing |
| Explorer Pro Scale |
mass measurement |
| Filmetrics F50 Reflectometer |
Reflectometry |
| FormFactor Tesla CM300 Probe station |
Probe station for electrical characterization of integrated circuit devices, Titration |
| FP-10 Stylus Profilometer |
Accurate profile measuring |
| Fujifilm Dimatix DMP-2831 Materials Inkjet Printer |
Inkjet Printing |
| Gasonics L3510 |
Ashing, Photoresist removal |
| Gen II Custom Probe System |
Electrical testing |
| Heidelberg MLA-300 |
Lithography |
| Hewlett-Packard 3457A Multimeter |
Benchtop measurement of resistance, voltage, and current, Resistance to 3 GOhm, Voltage to 300v, Current to 3A, GPIB-based automated data acquisition |
| Hewlett-Packard 4284A LCR Meter |
Capacitance Testing, 20Hz – 1MHz, Capacitance-Frequency Sweeps, Capacitance-Voltage Sweeps, Inductance Measurement |
| Hioki RM2610 Electrode Resistance Tester |
High precision four point sheet resistance measurement. |
| Horiba GD-Profiler 2 Glow Discharge Optical Emission Spectrometer |
Emission Spectroscopy |
| HP T630 Plotter (36” Roll) |
Document and Poster Printing, Inkjet printing for posters and CAD drawings, Five colors: cyan, magenta, yellow, black, and matte black |
| Imada PEEL Tester MV-110 |
Peel testing |
| Jinlong PEEL Tester |
Peel testing |
| KDF-744 |
Batch-sputtering |
| Keithley 237 High Voltage Source-Measure Unit (SMU) |
Current-Voltage (IV) Characterization to 1100v |
| Keithley 2611A SourceMeter |
Benchtop measurement of voltage, current, Voltage to 200v, Current to 1.5A, GPIB-based automated data acquisition |
| Keithley 4200 Semiconductor Characterization System |
Benchtop measurement of voltage, current, Voltage to 200v, Current to 100mA, Graphical User Interface Setup and Operation, GPIB-based automated data acquisition - advanced programming skills required |
| Keyence VHX-7000 Microscope |
high resolution optical microscopy, surface profiling, differential interference contrast |
| Keyence VK-X3000 3D Surface Profiler |
High Resolution Optical Microscopy, Surface Profiling, Non-Contact 3D Quantification, 3D Surface Measurement, Surface roughness measurements, Film Thickness Measurements |
| Keysight B1505A Power Device Analyzer/Curve Tracer |
Electrical I-V characterization for wide-bandgap semiconductor devices., Capacitance testing at high voltage bias. , High voltage testing interface to Formfactor Tesla C300 probe station. |
| Keysight PD1500A Dynamic Power Device Analyzer/Double-Pulse Tester |
Electrical I-V characterization for wide-bandgap semiconductor devices, Titration |
| KLA Tencor Omnimapper 4 Point Probe |
4 point probe |
| Kruss DSA20E Easy Drop Goniometer/Contact Angle Measurement |
Goniometer/Contact Angle |
| Labulk 0335 Intelligent Tap Density Tester |
Tap Density Measurement |
| LanTec UV-ozone Cleaner Exposure |
Dry cleaning of organic contaminants from glass substrates |
| Laurell WS400B Spin Coater |
Spin coating |
| Mettler Toledo Titration Equipment |
Titration |
| Micro Manipulator 4060 |
Manual analytical probing |
| Mini Brute Tube Furnace - Model MB-80 |
Oxidation, Annealing, Alloying |
| MRC-603A |
Thin film metal deposition |
| MRC-603B |
Thin film metal deposition |
| Nomarski Contrast Microscope |
differential interference contrast microscopy, Nomarski microscopy |
| nTact Advantage II Slot Die Coater |
photoresist coating, polyimide coating |
| Olympus MHL110 Microscope |
Microscopy |
| Osiris 1204 Coater and Developer |
Photolithography |
| Park XE-150 Atomic Force Microscope |
atomic force microscopy |
| Photon Etc Hyperspectral Imager |
|
| Sartorius Scale |
mass measurement |
| Scanning Electron Microscope (SEM), SU3900 |
|
| Sun-Tec Laminator |
Lamination, Bonding |
| Tamar WaferScan |
Wafer Flatness |
| Tegal 901e |
plasma etching |
| Tegal 903e |
plasma etching |
| Tegal 965 |
Ashing |
| Tencor 6200 SurfScan Defect Scanner |
wafer defect inspection |
| Tencor FLX-2350FP |
Fim stress measurement |
| Tencor P-16 Profilometer |
Surface topography measuring |
| Tencor P2 Profilometer |
Profilometry |
| Thermo Nicolet 6700 FTIR |
Fourier Transform Infrared Spectroscopy |
| Thinky ARE-310 Centrifugal Mixer |
Centrifugal mixing |
| VWR Hot Plate |
Heating |
| Western Magnum XRL180 Laminator |
Dry film lamination |
| Woollam Ellipsometer M2000 |
Ellipsometry |
| Yamato DP43 Vacuum Bake Oven |
Vacuum pressure curing and baking |
| Yamato DP63 Vacuum Bake Oven |
Vacuum pressure curing and baking |
| YES 450-PB oven |
Baking |
| YES Vapor Prime Oven |
HMDS Vapor Prime Oven |
| YES – FPO HMDS Vapor Prime |
Photolithography, Vacuum bake HMDS vapor priming |
| Yokogawa WT5000 Precision Power Analyzer |
High precision voltage-current measurement |
