Description
The FormFactor Tesla CM300 probe station can provide unattended testing on small pads over time and at multiple temperatures. This instrument is capable of high-volume testing on up to 300mm diameter wafers. Measurements for I-V/C-V, RTN, and RF are possible with this probe station.
Chuck thermal range of -60oC to +300oC and DC, AC, and RF device characterization. Manual or automated probe positioning and alignment is possible.
Techniques
- Probe station for electrical characterization of integrated circuit devices
- Titration
Documents and manuals
- FileCM300 datasheet 2021.pdf1.41 MB
ASU Unit
Knowledge Enterprise
Rates
| Service | ASU rate | Nonprofit/other academic rate | Notes |
|---|---|---|---|
| Equipment Use | TBD |
Photos
