Keyence VHX-7000 Microscope


The Keyence VHX-7000 Optical Microscope has advanced imaging capabilities that make it possible to capture images with up to 6500x magnification. It is an ideal tool for critical dimension (CD) measurement and micron-scale topology mapping. Additionally, differential interference contrast can be utilized to enhance imaging quality and provide a more accurate representation of the sample's surface.

This high magnification optical microscope has a motorized xyz stage, 4k display, large depth of field, fiducial alignment, defect mapping, optical surface profiling, light and dark field viewing, differential interference contrast and a free angle observation stage. The VHX-7000 microscope is installed in a Class 100 cleanroom on an anti-vibration base. The equipment is not currently connected to an ASU network, please bring a USB drive to save your data.

  • high resolution optical microscopy, surface profiling, differential interference contrast
Documents and manuals
ASU Unit
Knowledge Enterprise
Service ASU rate Nonprofit/other academic rate Notes
Equipment Use $33/hr $43/hr