AMAT 8330

Description

The AMAT 8330 is an etch tool with a load lock and a process chamber. Six-inch wafers are loaded into the send cassette in the load chamber and the door is closed and the load lock is pumped down. The wafers are loaded onto the cathode one at a time onto three positions (top, middle and bottom) on all six sides of a hexagonally shaped cathode. The cathode is capable of holding 18 wafers in the process chamber at one time.

The 8330 etcher uses gases: O2, HCl, CH4, BCl3, Cl2 and Ar . 

Techniques
  • Etching
Documents and manuals
ASU Unit
Knowledge Enterprise
Rates
Service ASU rate Nonprofit/other academic rate Notes
Equipment use $40/hour $48/hour  
We welcome industry customers! Contact us to find out our current rates.