AMAT 8330

The AMAT 8330 is an etch tool with a load lock and a process chamber. Six-inch wafers are loaded into the send cassette in the load chamber and the door is closed and the load lock is pumped down. The wafers are loaded onto the cathode one at a time onto three positions (top, middle and bottom) on all six sides of a hexagonally shaped cathode. The cathode is capable of holding 18 wafers in the process chamber at one time.

The 8330 etcher uses gases: oxygen (O2), hydrochloric acid (HCl), methane (CH4), boron trichloride (BCl3), chlorine (Cl2) and argon (Ar).