Despatch Oven

Description

This is a high temperature cure oven used to cure Polyimide or ILD films on substrates. It uses a N2 purge for an inert atmosphere during the cure. It has a class 100 Hepa filter installed in order to keep particulates low.      

Specifications:

Chamber size:             25.5” W x 26” D x 37” H

Capacity:                     14 cubic feet

Max Load Capacity:    400 lbs

Volts:                           208

Amps:                          50.5

Phase:                         3

Hertz:                          50/60

Heater:                        16 KW

Max Temp:                  350 C

Temp Uniformity        +/- 3.5 C

Model No.                   LCD2-14NV-3

A typical recipe calls to specify the time to ramp up to temperature while at the same time how much inert gas to induce in order to have a stable atmosphere and temperature, the soak times at which a set time at a set determined temperature such as at the glass transition temperature, and the length of time at cure, then the length of time to cool.   
 

Techniques
  • Photolithography
Documents and manuals
ASU Unit
Knowledge Enterprise
Rates
Service ASU rate Nonprofit/other academic rate Notes
Equipment use $50/hour $60/hour  
We welcome industry customers! Contact us to find out our current rates.