Description
The Filmetrics reflectometer measures the reflectance of the surface of a thin film in order to calculate the film thickness. The reflectance measurement is very fast. A contour map of the wafer thickness with some 50-60 measurements can be generated in less than 2 minutes. Reflectometry measurements are best suited for verifying the thickness and uniformity of thin films whose optical constants are well understood. A table of the n and k values obtained via another method (usually spectroscopic ellipsometry) is necessary to obtain the most accurate results.
Techniques
- Reflectometry
ASU Unit
Knowledge Enterprise
Rates
| Service | ASU rate | Nonprofit/other academic rate | Notes |
|---|---|---|---|
| Measurement | $33/hr | $43/hr | Up to 200 mm wafers accepted |
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