The Filmetrics reflectometer measures the reflectance of the surface of a thin film in order to calculate the film thickness. The reflectance measurement is very fast. A contour map of the wafer thickness with some 50-60 measurements can be generated in less than 2 minutes. Reflectometry measurements are best suited for verifying the thickness and uniformity of thin films whose optical constants are well understood. A table of the n and k values obtained via another method (usually spectroscopic ellipsometry) is necessary to obtain the most accurate results.
|Service||ASU rate||Nonprofit/other academic rate||Notes|
|Measurement||$33/hr||$43/hr||Up to 200 mm wafers accepted|