Filmetrics F50

Description

The Filmetrics reflectometer measures the reflectance of the surface of a thin film in order to calculate the film thickness. The reflectance measurement is very fast. A contour map of the wafer thickness with some 50-60 measurements can be generated in less than 2 minutes. Reflectometry measurements are best suited for verifying the thickness and uniformity of thin films whose optical constants are well understood. A table of the n and k values obtained via another method (usually spectroscopic ellipsometry) is necessary to obtain the most accurate results.

Techniques
  • Reflectometry
ASU Unit
Knowledge Enterprise
Rates
Service ASU rate Nonprofit/other academic rate Notes
Measurement $25/hr  $30/hr Up to 200 mm wafers accepted
We welcome industry customers! Contact us to find out our current rates.
Photos
Front View