FP-10 Stylus Profilometer

Description

FP-10 Stylus Profilometer are designed to provide accurate profile measurements for Flat Panel Display (FPD) large surface area substrates. The FP-10 has an X, Y, axis moving stage which is fit all applications with small to larger size (up to Gen-II, 370 x 470 mm). The tool is applicable for:

  • Thin film heights
  • Thick film heights
  • Photo resist / soft films
  • Characterization of surface roughness or waviness
  • Surface Curvature and form
  • 2D stress on thin films
  • Peak to Valley Dimension analysis
  • 3D imaging
  • Flatness
  • Defect Analysis
Techniques
  • Accurate profile measuring
ASU Unit
Knowledge Enterprise
Rates
Service ASU rate Nonprofit/other academic rate Notes
Equipment use $25/hour $30/hour  
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