Description
FP-10 Stylus Profilometer is designed to provide accurate profile measurements for Flat Panel Display (FPD) large surface area substrates. The FP-10 has an X, Y, axis moving stage which is fit all applications with small to larger size (up to Gen-II, 370 x 470 mm). The tool is applicable for:
- Thin film heights
- Thick film heights
- Photo resist / soft films
- Characterization of surface roughness or waviness
- Surface Curvature and form
- 2D stress on thin films
- Peak to Valley Dimension analysis
- 3D imaging
- Flatness
- Defect Analysis
Techniques
- Accurate profile measuring
Documents and manuals
- File
- File
ASU Unit
Knowledge Enterprise
