Description
The Gasonics L3510 is a single wafer asher used to remove photoresist from wafers. Once a recipe is chosen, wafers are loaded automatically using a spatula into the reaction chamber. When complete, the wafer is unloaded to a cooling position for one minute and then returned to the original cassette.
Techniques
- Ashing
- Photoresist removal
ASU Unit
Knowledge Enterprise
Rates
Service | ASU rate | Nonprofit/other academic rate | Notes |
---|---|---|---|
Equipment use | $52/hour | $68/hour |
Photos