Gasonics L3510


The Gasonics L3510 is a single wafer asher used to remove photoresist from wafers. Once a recipe is chosen, wafers are loaded automatically using a spatula into the reaction chamber. When complete, the wafer is unloaded to a cooling position for one minute and then returned to the original cassette.

  • Ashing
  • Photoresist removal
ASU Unit
Knowledge Enterprise
Service ASU rate Nonprofit/other academic rate Notes
Equipment use $52/hour $68/hour