Gasonics L3510

Description

The Gasonics L3510 is a single wafer asher used to remove photoresist from wafers. Once a recipe is chosen, wafers are loaded automatically using a spatula into the reaction chamber. When complete, the wafer is unloaded to a cooling position for one minute and then returned to the original cassette.

Techniques
  • Ashing
  • Photoresist removal
ASU Unit
Knowledge Enterprise
Rates
Service ASU rate Nonprofit/other academic rate Notes
Equipment use $40/hour $48/hour  
We welcome industry customers! Contact us to find out our current rates.