Description
The Mini Brute Tube Furnace is a horizontal tube atmospheric furnace system for oxidation, annealing, and alloying that is manually controlled by the user. The user may set a temperature up to 900°C and process pieces up to 6” wafers. This furnace is equipped with a forming gas purge as well as a water bubbler for wet oxidation applications.
Techniques
- Oxidation
- Annealing
- Alloying
ASU Unit
Knowledge Enterprise
Rates
| Service | ASU rate | Nonprofit/other academic rate | Notes |
|---|---|---|---|
| Equipment use | $39/hour | $51/hour |
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