Description
The Tegal 965 is a barrel asher used to remove photoresist from wafers in a batch method. Wafers are loaded standing up into quartz boats up to 25 wafers at a time per boat. The boats are then placed into the asher and the process recipe is loaded from the menu and the photoresist is removed from wafers
Techniques
- Ashing
Documents and manuals
Rates
| Service or material | ASU rate | Nonprofit or academic rate | Notes |
|---|---|---|---|
| Equipment use | $54/hour | $70/hour |
