Tegal 965


The Tegal 965 is a barrel asher used to remove photoresist from wafers in a batch method. Wafers are loaded standing up into quartz boats up to 25 wafers at a time per boat. The boats are then placed into the asher and the process recipe is loaded from the menu and the photoresist is removed from wafers

  • Ashing
Documents and manuals
ASU Unit
Knowledge Enterprise
Service ASU rate Nonprofit/other academic rate Notes
Equipment use $52/hour $68/hour