Tegal 965

Description

The Tegal 965 is a barrel asher used to remove photoresist from wafers in a batch method. Wafers are loaded standing up into quartz boats up to 25 wafers at a time per boat. The boats are then placed into the asher and the process recipe is loaded from the menu and the photoresist is removed from wafers

Techniques
  • Ashing
Documents and manuals
ASU Unit
Knowledge Enterprise
Rates
Service ASU rate Nonprofit/other academic rate Notes
Equipment use $40/hour $48/hour  
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