Tencor 6200 SurfScan Defect Scanner

The Tencor 6200 SurfScan Defect Scanner is an inspection tool designed to map the defectivity of a wafer. The defect resolution of the SurfScan is sufficient to reliably detect particles as small as 0.2 microns in diameter on an unpatterned silicon wafer. The SurfScan uses a normal incidence laser beam to detect imperfections in the wafer surface when the laser beam is scattered. The laser is scanned over a targeted area of the wafer as defined by the user resulting in a wafer defect map.