Tencor 6200 SurfScan Defect Scanner


The Tencor 6200 SurfScan Defect Scanner is an inspection tool designed to map the defectivity of a wafer. The defect resolution of the SurfScan is sufficient to reliably detect particles as small as 0.2 microns in diameter on an unpatterned silicon wafer. The SurfScan uses a normal incidence laser beam to detect imperfections in the wafer surface when the laser beam is scattered. The laser is scanned over a targeted area of the wafer as defined by the user resulting in a wafer defect map.

  • wafer defect inspection
Documents and manuals
ASU Unit
Knowledge Enterprise
Service ASU rate Nonprofit/other academic rate Notes
Equipment use $36/hour $50/hour  
Tencor 6200 SurfScan Defect Scanner