CHA Metal Evaporator

Description

The CHA Metal Evaporator is a bell jar style e-beam evaporator for metals. The turret consists of 6 pockets, each with a 15cc volume. The system is equipped with automatic deposition rate and thickness control, including multilayer process programming, ex. titanium/nickel/gold. Rotating dome configuration, capable of 2” through 6” round substrates. Pieces, parts, and variable shapes may also be processed using custom fixturing. Gold and copper usage is permitted in the CHA metal evaporator. If your devices are sensitive to gold and/or copper contamination, please consider using the neighboring CHA TCO evaporator found at the following hyperlink:
https://cores.research.asu.edu/aep/equipment/cha-tco-evaporator-sr-10

Techniques
  • e-beam evaporation
ASU Unit
Knowledge Enterprise
Rates
Service ASU rate Nonprofit/other academic rate Notes
Equipment use $30/hour $36/hour  
We welcome industry customers! Contact us to find out our current rates.