CHA TCO Evaporator SR-10


The CHA TCO Evaporator SR-10 is a bell jar style evaporator for oxides and nitrides including, but not limited to, anti-reflective coatings and conductive oxides. The system is configured with both a resistive source and an e-beam source. Evaporation using the resistive source is confined to a single boat or box. 4 pocket e-beam source, of 25cc per pocket, is configured for single or multilayer processing. The system is equipped with automatic deposition rate and thickness control for the deposition. Custom configuration to flow controlled amounts of reactive gas at a fixed pressure during deposition. System is also configured with an RGA allowing in-situ gas monitoring and analysis. Custom bi-directional dome rotation to improve uniformity and step coverage. Substrate heaters installed for film density and structure improvement. Dome is capable of 2”-6” substrate processing. In addition, parts, pieces, and other substrate sizes may be attached to custom fixturing. Gold and copper usage is NOT permitted in the CHA TCO evaporator. If your devices require gold or copper deposition, please consider using the neighboring CHA metal evaporator found at the following hyperlink:

  • Evaporation deposition
ASU Unit
Knowledge Enterprise
Service ASU rate Nonprofit/other academic rate Notes
Equipment use $30/hour $36/hour  
We welcome industry customers! Contact us to find out our current rates.