Semiconductor Device Processing Nanofab Equipment and Rates

Equipment and rates

AS-One 100 RTP

Service or material ASU rate Nonprofit or academic rate Notes
Equipment Use $52.50/hr Contact Nanofab for external rates.

AS-One 150 RTP

Service or material ASU rate Nonprofit or academic rate Notes
Equipment use $52.50/hr Contact Nanofab for external rates.

Cambridge Savannah ALD Deposition Tool

Service or material ASU rate Nonprofit or academic rate Notes
Equipment use $52.50/hr Contact Nanofab for external rates.

CEE Spin Coater #1 and #2

Service or material ASU rate Nonprofit or academic rate Notes
Equipment use $52.50/hr Contact Nanofab for external rates.

CHA E-Beam Evaporator

Service or material ASU rate Nonprofit or academic rate Notes
Equipment use $52.50/hr Contact Nanofab for external rates.

Edwards2 Thermal Evaporator

Service or material ASU rate Nonprofit or academic rate Notes
Equipment use $52.50/hr Contact Nanofab for external rates.

Elionix ELS-BODEN 100keV Electron Beam Lithography

Service or material ASU rate Nonprofit or academic rate Notes
Equipment use $63/hr Contact Nanofab for external rates.

EVG 620 Aligner

Service or material ASU rate Nonprofit or academic rate Notes
Equipment use $52.50/hr Contact Nanofab for external rates.

Filmetrics F20 and F40

Service or material ASU rate Nonprofit or academic rate Notes
Equipment use $52.50/hr Contact Nanofab for external rates.

Heidelberg MLA-150

Service or material ASU rate Nonprofit or academic rate Notes
Equipment use $52.50/hr Contact Nanofab for external rates.

Hitachi S-4700 Field Emission Scanning Electron Microscope

Service or material ASU rate Nonprofit or academic rate Notes
Equipment use $42/hr Contact Nanofab for external rates.

Lesker #1 Sputter Deposition Tool

Service or material ASU rate Nonprofit or academic rate Notes
Equipment use $52.50/hr Contact Nanofab for external rates.

Lesker #2 Sputter Deposition Tool

Service or material ASU rate Nonprofit or academic rate Notes
Equipment use $52.50/hr Contact Nanofab for external rates.

Lesker #3 E-Beam Evaporator

Service or material ASU rate Nonprofit or academic rate Notes
Equipment use $52.50/hr Contact Nanofab for external rates.

Lesker #4 E-Beam Evaporator

Service or material ASU rate Nonprofit or academic rate Notes
Equipment use $52.50/hr Contact Nanofab for external rates.

Lesker #5 Sputter Deposition Tool

Service or material ASU rate Nonprofit or academic rate Notes
Equipment use $52.50/hr Contact Nanofab for external rates.

OAI 808 Aligner

Service or material ASU rate Nonprofit or academic rate Notes
Equipment use $52.50/hr Contact Nanofab for external rates.

Oxford PECVD

Service or material ASU rate Nonprofit or academic rate Notes
Equipment use $52.50/hr Contact Nanofab for external rates.

PlasmaLab M80 Plus – Chlorine

Service or material ASU rate Nonprofit or academic rate Notes
Equipment use $52.50/hr Contact Nanofab for external rates.

PlasmaLab M80 Plus – Fluorine

Service or material ASU rate Nonprofit or academic rate Notes
Equipment use $52.50/hr Contact Nanofab for external rates.

PlasmaTherm 790 RIE – Fluorine

Service or material ASU rate Nonprofit or academic rate Notes
Equipment use $52.50/hr Contact Nanofab for external rates.

PlasmaTherm Apex ICP

Service or material ASU rate Nonprofit or academic rate Notes
Equipment use $52.50/hr Up to 450 watt hours. Contact Nanofab for external rates.

SCS Spin Coater

Service or material ASU rate Nonprofit or academic rate Notes
Equipment use $52.50/hr Contact Nanofab for external rates.

STS AGE ICP – Chlorine

Service or material ASU rate Nonprofit or academic rate Notes
Equipment use $52.50/hr Contact Nanofab for external rates.

STS ASE ICP DRIE – Fluorine

Service or material ASU rate Nonprofit or academic rate Notes
Equipment use $52.50/hr Contact Nanofab for external rates.

Tegal 421

Service or material ASU rate Nonprofit or academic rate Notes
Equipment use $52.50/hr Contact Nanofab for external rates.

Xactix XeF2 Si Etcher

Service or material ASU rate Nonprofit or academic rate Notes
Equipment use $52.50/hr Contact Nanofab for external rates.

Zygo ZeGage

Service or material ASU rate Nonprofit or academic rate Notes
Equipment use $52.50/hr Contact Nanofab for external rates.

For industry rates, contact us.

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