Rates

We welcome industry customers! Contact us to find out our current rates.

AS-One 150 RTP

Service ASU rate Nonprofit/other academic rate Notes
Equipment use
$46.35 per Hour
Contact NanoFab
 

CEE Spin Coater #1 and #2

Service ASU Internal Rate External Organizations Notes
Equipment use $46.35 per Hour Contact NanoFab  

CHA E-Beam Evaporator

Service ASU Internal Rate External Organizations Notes
Equipment use $46.35 per Hour Contact NanoFab  

EVG 620 Aligner

Service ASU Internal Rate External Organizations Notes
Equipment use $46.35 per Hour Contact NanoFab

 

Filmetrics F20 and F40

Service ASU Internal Rate External Organizations Notes
Equipment use  $46.35 per Hour Contact NanoFab  

GCA 8500 5X Stepper

Service ASU Internal Rate External Organizations Notes
Equipment use $46.35 per Hour Contact NanoFab  

Heat Pulse RTP

Service ASU rate Nonprofit/other academic rate Notes
Equipment use    
$46.35 per Hour  
Contact NanoFab
 

OAI 808 Aligner

Service ASU Internal Rate External Organizations Notes
Equipment use $46.35 per Hour Contact ASU  

Oxford PECVD

Service ASU rate Nonprofit/other academic rate Notes
Equipment use $46.35 per Hour Contact NanoFab  

PlasmaTherm Apex ICP

Service ASU Internal Rate External Organizations Notes
Equipment use $46.35 per Hour Contact NanoFab  

SCS Spin Coater

Service ASU Internal Rate External Organizations Notes
Equipment use $46.35 per Hour Contact NanoFab  

STS AGE ICP - Chlorine

Service ASU Internal Rate External Organizations Notes
Equipment use $46.35 per Hour Contact NanoFab  

Tegal 421

Service ASU Internal Rate External Organizations Notes
Equipment use $46.35 per Hour Contact NanoFab  

Xactix XeF2 Si Etcher

Service ASU Internal Rate External Organizations Notes
Equipment use $46.35 per Hour Contact NanoFab  

Zygo ZeGage

Service ASU Internal Rate External Organizations Notes
Equipment use $46.35 per Hour Contact NanoFab