Rates

AS-One 100 RTP

Service ASU rate Nonprofit/other academic rate Notes
Equipment use    
$50 per Hour  
Contact NanoFab
 

AS-One 150 RTP

Service ASU rate Nonprofit/other academic rate Notes
Equipment use
$50 per Hour
Contact NanoFab
 

CEE Spin Coater #1 and #2

Service ASU Internal Rate External Organizations Notes
Equipment use $50 per Hour Contact NanoFab  

CHA E-Beam Evaporator

Service ASU Internal Rate External Organizations Notes
Equipment use $50 per Hour Contact NanoFab  

EVG 620 Aligner

Service ASU Internal Rate External Organizations Notes
Equipment use $50 per Hour Contact NanoFab

 

Filmetrics F20 and F40

Service ASU Internal Rate External Organizations Notes
Equipment use  $50 per Hour Contact NanoFab  

Heidelberg MLA-150

Service ASU Internal Rate External Organizations Notes
Equipment use $50 per Hour Contact NanoFab  

OAI 808 Aligner

Service ASU Internal Rate External Organizations Notes
Equipment use $50 per Hour Contact ASU  

Oxford PECVD

Service ASU rate Nonprofit/other academic rate Notes
Equipment use $50 per Hour Contact NanoFab  

PlasmaTherm Apex ICP

Service ASU Internal Rate External Organizations Notes
Equipment use $50 per Hour Contact NanoFab  

SCS Spin Coater

Service ASU Internal Rate External Organizations Notes
Equipment use $50 per Hour Contact NanoFab  

STS AGE ICP - Chlorine

Service ASU Internal Rate External Organizations Notes
Equipment use $50 per Hour Contact NanoFab  

Tegal 421

Service ASU Internal Rate External Organizations Notes
Equipment use $50 per Hour Contact NanoFab  

Xactix XeF2 Si Etcher

Service ASU Internal Rate External Organizations Notes
Equipment use $50 per Hour Contact NanoFab  

Zygo ZeGage

Service ASU Internal Rate External Organizations Notes
Equipment use $50 per Hour Contact NanoFab