Rates
AS-One 100 RTP
Service | ASU rate | Nonprofit/other academic rate | Notes | ||||||
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AS-One 150 RTP
Service | ASU rate | Nonprofit/other academic rate | Notes | |||
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Cambridge Savannah ALD Deposition Tool
Service | ASU Internal Rate | External Organizations | Notes |
---|---|---|---|
Equipment use | $50 per Hour | Contact NanoFab |
CEE Spin Coater #1 and #2
Service | ASU Internal Rate | External Organizations | Notes |
---|---|---|---|
Equipment use | $50 per Hour | Contact NanoFab |
CHA E-Beam Evaporator
Service | ASU Internal Rate | External Organizations | Notes |
---|---|---|---|
Equipment use | $50 per Hour | Contact NanoFab |
Edwards2 Thermal Evaporator
Service | ASU Internal Rate | External Organizations | Notes |
---|---|---|---|
Equipment use | $50 per Hour | Contact NanoFab |
Elionix ELS-BODEN 100keV Electron Beam Lithography
Service | ASU Internal Rate | External Organizations | Notes |
---|---|---|---|
Equipment use | $60 per Hour | Contact NanoFab |
EVG 620 Aligner
Service | ASU Internal Rate | External Organizations | Notes |
---|---|---|---|
Equipment use | $50 per Hour | Contact NanoFab |
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Filmetrics F20 and F40
Service | ASU Internal Rate | External Organizations | Notes |
---|---|---|---|
Equipment use | $50 per Hour | Contact NanoFab |
Heidelberg MLA-150
Service | ASU Internal Rate | External Organizations | Notes |
---|---|---|---|
Equipment use | $50 per Hour | Contact NanoFab |
Hitachi S-4700 Field Emission Scanning Electron Microscope
Service | ASU Internal Rate | External Organizations | Notes |
---|---|---|---|
Equipment use | $40 per Hour | Contact NanoFab |
Lesker #1 Sputter Deposition Tool
Service | ASU Internal Rate | External Organizations | Notes |
---|---|---|---|
Equipment use | $50 per Hour | Contact NanoFab |
Lesker #2 Sputter Deposition Tool
Service | ASU Internal Rate | External Organizations | Notes |
---|---|---|---|
Equipment use | $50 per Hour | Contact NanoFab |
Lesker #3 E-Beam Evaporator
Service | ASU Internal Rate | External Organizations | Notes |
---|---|---|---|
Equipment use | $50 per Hour | Contact NanoFab |
Lesker #4 E-Beam Evaporator
Service | ASU Internal Rate | External Organizations | Notes |
---|---|---|---|
Equipment use | $50 per Hour | Contact NanoFab |
Lesker #5 Sputter Deposition Tool
Service | ASU rate | Nonprofit/other academic rate | Notes |
---|---|---|---|
Equipment use | $50 per Hour | Contact NanoFab |
OAI 808 Aligner
Service | ASU Internal Rate | External Organizations | Notes |
---|---|---|---|
Equipment use | $50 per Hour | Contact ASU |
Oxford PECVD
Service | ASU rate | Nonprofit/other academic rate | Notes |
---|---|---|---|
Equipment use | $50 per Hour | Contact NanoFab |
PlasmaLab M80 Plus – Chlorine
Service | ASU Internal Rate | External Organizations | Notes |
---|---|---|---|
Equipment use | $50 per Hour | Contact NanoFab |
PlasmaLab M80 Plus – Fluorine
Service | ASU Internal Rate | External Organizations | Notes |
---|---|---|---|
Equipment use | $50 per Hour | Contact NanoFab |
PlasmaTherm 790 RIE – Fluorine
Service | ASU Internal Rate | External Organizations | Notes |
---|---|---|---|
Equipment use | $50 per Hour | Contact NanoFab |
PlasmaTherm Apex ICP
Service | ASU Internal Rate | External Organizations | Notes |
---|---|---|---|
Equipment use | $50 per Hour | Contact NanoFab |
SCS Spin Coater
Service | ASU Internal Rate | External Organizations | Notes |
---|---|---|---|
Equipment use | $50 per Hour | Contact NanoFab |
STS AGE ICP - Chlorine
Service | ASU Internal Rate | External Organizations | Notes |
---|---|---|---|
Equipment use | $50 per Hour | Contact NanoFab |
STS ASE ICP DRIE – Fluorine
Service | ASU Internal Rate | External Organizations | Notes |
---|---|---|---|
Equipment use | $50 per Hour | Contact NanoFab |
Tegal 421
Service | ASU Internal Rate | External Organizations | Notes |
---|---|---|---|
Equipment use | $50 per Hour | Contact NanoFab |
Xactix XeF2 Si Etcher
Service | ASU Internal Rate | External Organizations | Notes |
---|---|---|---|
Equipment use | $50 per Hour | Contact NanoFab |
Zygo ZeGage
Service | ASU Internal Rate | External Organizations | Notes |
---|---|---|---|
Equipment use | $50 per Hour | Contact NanoFab |